1. Scientific-Manufacturing Complex “Technological Centre”, 124498 Moscow, Russia
2. Department of Theoretical Physics, Moscow Institute of Physics and Technology (MIPT), 141700 Dolgoprudny, Russia
3. Laboratory of Diffusion Processes, Ulyanovsk State University, 432017 Ulyanovsk, Russia
4. Institute of Integrated Electronics, National Research University of Electronic Technology (MIET), 124498 Moscow, Russia