1. Institute of Advanced Materials and Technologies, National Research University of Electronic Technology—MIET, Bld. 1, Shokin Square, Zelenograd, 124498 Moscow, Russia
2. Scientific Research Institute of Physical Problems Named after F.V. Lukin, Pass. 4806, Bld., Zelenograd, 124498 Moscow, Russia
3. S.P. Kapitsa Scientific Technological Research Institute, Ulyanovsk State University, 42 Leo Tolstoy Street, 432017 Ulyanovsk, Russia
4. Institute of Nanotechnology of Microelectronics RAS, 32A Leninsky Prospekt, 119991 Moscow, Russia
5. Institute for Bionic Technologies and Engineering, I.M. Sechenov First Moscow State Medical University, Bolshaya Pirogovskaya 2, 119435 Moscow, Russia