Influence of the Sputtering Temperature on Reflectivity and Electrical Properties of ITO/AgIn/ITO Composite Films for High-Reflectivity Anodes-Reference-Cited by-同舟云学术

Influence of the Sputtering Temperature on Reflectivity and Electrical Properties of ITO/AgIn/ITO Composite Films for High-Reflectivity Anodes

Published:2023-04-03 Issue:7 Volume:16 Page:2849
ISSN:1996-1944
Container-title:Materials
language:en
Short-container-title:Materials

Author:

Wang Xianqi¹,Zhao Hongda²,Yang Bo¹^ORCID,Li Song¹^ORCID,Li Zongbin¹,Yan Haile¹,Zhang Yudong³,Esling Claude³,Zhao Xiang¹,Zuo Liang¹^ORCID

Affiliation:

1. Key Laboratory for Anisotropy and Texture of Materials, School of Material Science and Engineering, Northeastern University, Shenyang 110819, China

2. Shenyang Dong Chuang Precious Metals Material Co., Ltd., Shenyang 110065, China

3. Laboratoire d’Étude des Microstructures et de Mécanique des Matériaux (LEM3), CNRS UMR 7239, Université de Lorraine, 57045 Metz, France

Abstract

In this paper, indium tin oxide/silver indium/indium tin oxide (ITO/AgIn/ITO) composite films were deposited on glass substrates by magnetron sputtering. The effects of the sputtering temperature on the optical and electrical properties of the composite films were systematically investigated. The ITO/AgIn/ITO composite films deposited at sputtering temperatures of 25 °C and 100 °C demonstrated a high reflectivity of 95.3% at 550 nm and a resistivity of about 6.8–7.3 μΩ·cm. As the sputtering temperature increased, the reflectivity decreased and the resistivity increased slightly. The close connection between microstructure and surface morphology and the optical and electrical properties of the composite films was further illustrated by scanning electron microscopy imaging and atomic force microscopy imaging. It is shown that the ITO/AgIn/ITO thin films have a promising application for high-reflectivity anodes.

Funder

National Natural Science Foundation of China

Program of Introducing Talents of Discipline Innovation to Universities 2.0

Publisher

MDPI AG

Subject

General Materials Science

Link

https://www.mdpi.com/1996-1944/16/7/2849/pdf

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