1. Department of Mechanical Engineering, College of Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
2. Mechanical and Mechatronics Systems Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan
3. Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan City 333326, Taiwan
4. Department of MCU/DSP System Design, ELAN Microelectronics Corporation, Hsinchu 30076, Taiwan
5. Department of Material Science and Engineering, College of Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan