Dense, Strong, and Precise Silicon Nitride-Based Ceramic Parts by Lithography-Based Ceramic Manufacturing

Abstract

Due to the high level of light absorption and light scattering of dark colored powders connected with the high refractive indices of ceramic particles, the majority of ceramics studied via stereolithography (SLA) have been light in color, including ceramics such as alumina, zirconia and tricalcium phosphate. This article focuses on a lithography-based ceramic manufacturing (LCM) method for β-SiAlON ceramics that are derived from silicon nitride and have excellent material properties for high temperature applications. This study demonstrates the general feasibility of manufacturing of silicon nitride-based ceramic parts by LCM for the first time and combines the advantages of SLA, such as the achievable complexity and low surface roughness (Ra = 0.50 µm), with the typical properties of conventionally manufactured silicon nitride-based ceramics, such as high relative density (99.8%), biaxial strength (σf = 764 MPa), and hardness (HV10 = 1500).