Groove Formation in Glass Substrate by a UV Nanosecond Laser

Author:

Shin JoonghanORCID,Nam Kimoon

Abstract

This study reports the laser grooving of glass. In this study, an ultraviolet (UV) nanosecond laser is used to produce grooves in soda lime glass by varying laser power, scan speed, pulse repetition rate, and number of scans. The threshold power density to generate damage on glass surface is found to be ~6.37 × 108 W/cm2. According to the result of a single laser scan, at a high laser power and low scan speed, material removal does not nearly occur, and only volume melting underneath the glass surface and large thermal crack are induced. With the decreasing laser power and increasing scan speed, a groove with a smooth surface is formed owing to the melting-dominant material removal process. The groove of rough surface morphology is produced with the further increase of the scan speed due to shattering induced by shock wave. Under this condition, it is found that either small cracks are produced or a crack-free groove is obtained. In this study, the fabrication of the microchannel for bio-chip application is also attempted by multiple laser scans. The near rectangular-shaped and crack-free groove (width × depth: ~220 μm × ~500 μm) with quite a smooth surface is fabricated by the multiple laser scans with a non-zero scan spacing.

Funder

National Research Foundation of Korea

Publisher

MDPI AG

Subject

Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Gorilla Glass Cutting Using Femtosecond Laser Pulse Filaments;Applied Sciences;2023-12-29

2. Direct Laser Ablation of Glasses with Low Surface Roughness Using Femtosecond UV Laser Pulses;Journal of Laser Micro/Nanoengineering;2022-10

3. Surface roughness optimization during femtosecond UV laser ablation;Fiber Lasers and Glass Photonics: Materials through Applications III;2022-05-25

4. Infrared Nanosecond Laser Texturing of Cu-Doped Bioresorbable Calcium Phosphate Glasses;Applied Sciences;2022-03-30

5. Large Area Surface Ablation and Micropatterning of Transparent Dielectrics with Femtosecond UV Laser Pulses;2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC);2021-06-21

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