1. Flexible Printed Electronics Technology Center, Harbin Institute of Technology, Shenzhen 518055, China
2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150001, China
3. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
4. Changsha Semiconductor Technology and Application Innovation Research Institute, College of Semiconductors, Hunan University, Changsha 410082, China