Wearable Capacitive Pressure Sensor for Contact and Non-Contact Sensing and Pulse Waveform Monitoring

Abstract

Sensitive and flexible pressure sensors have invoked considerable interest for a broad range of applications in tactile sensing, physiological sensing, and flexible electronics. The barrier between high sensitivity and low fabrication cost needs to be addressed to commercialize such flexible pressure sensors. A low-cost sacrificial template-assisted method for the capacitive sensor has been reported herein, utilizing a porous Polydimethylsiloxane (PDMS) polymer and a multiwalled carbon nanotube (MWCNT) composite-based dielectric layer. The sensor shows high sensitivity of 2.42 kPa−1 along with a low limit of detection of 1.46 Pa. The high sensitivity originates from adding MWCNT to PDMS, increasing the composite polymer’s dielectric constant. Besides this, the pressure sensor shows excellent stability at a cyclic loading of 9000 cycles, proving its reliability for long-lasting application in tactile and physiological sensing. The high sensitivity of the sensor is suitable for the detection of small deformations such as pulse waveforms as well as tactile pressure sensing. In addition, the paper demonstrates a simultaneous contact and non-contact sensing capability suitable for dual sensing (pressure and proximity) with a single data readout system. The dual-mode sensing capability may open opportunities for realizing compact systems in robotics, gesture control, contactless applications, and many more. The practicality of the sensor was shown in applications such as tactile sensing, Morse code generator, proximity sensing, and pulse wave sensing.