1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471003, China
2. Henan Engineering Research Center for High Purity Materials and Sputtering Targets, Luoyang 471003, China
3. School of Mechanical Engineering, Anyang Institute of Technology, Anyang 455099, China
4. Luoyang Crystal Union Photoelectric Materials Co., Ltd., Luoyang 471100, China