1. State Key Laboratory of Silicon and Advanced Semiconductor Materials, Zhejiang University, Hangzhou 310058, China
2. School of Materials Science and Engineering, Zhejiang University, Hangzhou 310058, China
3. College of Engineering, Zhejiang Normal University, Jinhua 321004, China
4. Key Laboratory of Urban Rail Transit Intelligent Operation and Maintenance Technology & Equipment of Zhejiang Province, Zhejiang Normal University, Jinhua 321004, China
5. College of Electrical Engineering, Zhejiang University, Hangzhou 310058, China