Affiliation:
1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2. School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
Abstract
Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm2 exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar.
Funder
National Key R&D Program of China
National Natural Science Foundation of China
Science and Technology Innovation Plan of Shanghai
Scientific Instrument Project of the Chinese Academy of Sciences
Shanghai Pujiang Program
Innovation Team and Talents Cultivation Program of National Administration of Traditional Chinese Medicine
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
1 articles.
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