1. Institute of Solid-State Electronics, Faculty of Electrical and Computer Engineering, TUD Dresden University of Technology, Mommsenstraße 15, 01069 Dresden, Germany
2. Fraunhofer Institute for Material and Beam Technology IWS, Winterbergstraße 28, 01277 Dresden, Germany
3. Institute of Materials Science, Faculty of Mechanical Science and Engineering, TUD Dresden University of Technology, Helmholtzstraße 7, 01069 Dresden, Germany
4. Institute of Measurement Technology, Department of Mechatronics, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, Austria