Improving Low Frequency Isolation Performance of Optical Platforms Using Electromagnetic Active-Negative-Stiffness Method

Abstract

To improve the low-frequency isolation performance of optical platforms, an electromagnetic active-negative-stiffness generator (EANSG) was proposed, using nano-resolution laser interferometry sensors to monitor the micro-vibration of an optical platform, and precision electromagnetic actuators integrated with a relative displacement feedback strategy to counteract the positive stiffness of pneumatic springs within a micro-vibration stroke, thereby producing high-static-low-dynamic stiffness characteristics. The effectiveness of the method was verified by both theoretical and experimental analyses. The experimental results show that the vertical natural frequency of the optical platform was reduced from 2.00 to 1.37 Hz, the root mean square of displacement was reduced from 1.28 to 0.69 μm, and the root mean square of velocity was reduced from 14.60 to 9.33 μm/s, proving that the proposed method can effectively enhance the low frequency isolation performance of optical platforms.