Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference131 articles.
1. Microfabrication in Biology and Medicine
2. Overview of Glass Micromachining Processes for MEMS Applications;Sarvela;MEMS J.,2010
3. Strategies in deep wet etching of Pyrex glass
4. AGC Succeeds in Developing Micro Hole Drilling Processing Technology for Ultra-Thin Glass with a Thickness in the Order of Micronshttp://www.agc.com/english/news/2012/0305e.pdf
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