Research on Critical Load of Lithium Niobate Crystal Lapping

Abstract

The elastic modulus and hardness of lithium niobate crystals were obtained by nanoindentation technology, and critical load and critical indentation depth range were determined by AFM by indentation morphology under different loads. According to the normal distribution characteristics of abrasive grains, the critical load model of lapping was deduced, and the critical load of lithium niobate during lapping process under different grain sizes was obtained. It was verified using a single-factor experiment in which experimental results were consistent with theoretical research.