A Vectorial Current Density Imaging Method Based on Magnetic Gradient Tensor

Abstract

Magnetic current imaging is deemed an emerging powerful technique for visualizing electrical currents in electronic devices. However, the existing magnetic-field-based Fourier Transform back-evolution method is limited by its mono-function of imaging the magnitude of current density in devices under test, and subject to background noise distortion. Here, we developed a novel vectorial current density imaging method based on the detection of the magnetic field gradient generated by current carrying conductors. A closed form solution of current density inversion was analytically derived and numerically verified. Experiments were conducted by scanning tri-axial fluxgate sensor over different shapes of electrical wires. The results show that a current density resolution of 24.15 mA/mm2, probe-to-sample separation of 2 mm, and spatial resolution of 0.69 mm were achieved over a maximum scanning area of 300 mm × 300 mm. Such a method is verified to be capable of simultaneously imaging both magnitude and directions of current density, which is a promising technique for in situ noninvasive inspection for the power electronic and semiconductor industry.