Rheotaxially Grown and Vacuum Oxidized SnOx Nanolayers for NO2 Sensing Characteristics at ppb Level and Room Temperature

Abstract

This work presents, for the very first time, very promising nitrogen dioxide (NO2) sensing characteristics of SnOx nanolayers obtained by the innovative and unique rheotaxial growth and vacuum oxidation (RGVO) processing technique. The NO2 gas sensing experiments were performed using the novel surface photovoltage gas sensing device. The measured detection limit at room temperature (RT) is as low as 10 ppb NO2 in synthetic air, whereas the detection limit calculated on the basis of signal to noise ratio is around 6 ppb NO2. For the complementary study of surface chemistry of RGVO SnOx nanolayers, including nonstoichiometry, presence of carbon contamination and surface bondings, the X-ray photoelectron spectroscopy (XPS) method was applied. The SnOx RGVO samples reveal nonstoichiometry because the relative concentration [O]/[Sn] equals 0.94 for the as deposited sample and increases upon subsequent air exposure and NO2 sensing. Moreover, carbon contamination has been recognized after exposing the RGVO SnOx nanolayers to the air and during the NO2 detection.