Some Considerations about the Use of Contact and Confocal Microscopy Methods in Surface Texture Measurement

Abstract

Surface metrology employs various measurement techniques, among which there has been an increase of noteworthy research into non-contact optical and contact stylus methods. However, some deeper considerations about their differentiation and compatibility are still lacking and necessary. This work compares the measurement characteristics of the confocal microscope with the portable stylus profilometer instrumentation, from a metrological point of view (measurement precision and accuracy, and complexity of algorithms for data processing) and an operational view (measuring ranges, measurement speed, environmental and operational requirements, and cost). Mathematical models and algorithms for roughness parameters calculation and their associated uncertainties evaluation are developed and validated. The experimental results demonstrate that the stylus profilometer presents the most reliable measurement with the highest measurement speed and the least complex algorithms, while the image confocal method takes advantage of higher vertical and horizontal resolution when compared with the employed stylus profilometer.