1. Osipyan Institute of Solid State Physics RAS, Academician Osipyan Str., 2, 142432 Chernogolovka, Russia
2. Moscow Institute of Physics and Technology, Institusky Lane, 9, 141700 Dolgoprudny, Russia
3. Prokhorov General Physics Institute of Russian Academy of Sciences, Vavilova Street, 38, 119991 Moscow, Russia
4. Department of Materials Science, Moscow Polytechnic University, Bolshaya Semyonovskaya Str., 38, 107023 Moscow, Russia
5. Department of Materials Science of Semiconductors and Dielectrics, National University of Science and Technology «MISIS», Leninskiy Prospect, 4, 119049 Moscow, Russia