Etching and Doping of Pores in Polyethylene Terephthalate Analyzed by Ion Transmission Spectroscopy and Nuclear Depth Profiling

Abstract

This work is devoted to the study of controlled preparation and filling of pores in polyethylene terephthalate (PET) membranes. A standard wet chemical etching with different protocols (isothermal and isochronous etching for different times and temperatures and etching from one or both sides of the films) was used to prepare the micrometric pores. The pores were filled with either a LiCl solution or boron deposited by magnetron sputtering. Subsequent control of the pore shape and dopant filling was performed using the nuclear methods of ion transmission spectroscopy (ITS) and neutron depth profiling (NDP). It turned out that wet chemical etching, monitored and quantified by ITS, was shown to enable the preparation of the desired simple pore geometry. Furthermore, the effect of dopant filling on the pore shape could be well observed and analyzed by ITS and, for relevant light elements, by NDP, which can determine their depth (and spatial) distribution. In addition, both non-destructive methods were proven to be suitable and effective tools for studying the preparation and filling of pores in thin films. Thus, they can be considered promising for research into nanostructure technologies of thin porous membranes.