Affiliation:
1. CAS Key Laboratory of Materials for Energy Conversion, Department of Materials Science and Engineering, University of Science and Technology of China, Hefei 230026, China
Abstract
An amorphous silicon oxycarbide membrane supported on a silicon nitride membrane substrate was prepared. A starting suspension containing polyhydromethylsiloxane (PHMS), tetramethyltetravinyl-cyclotetrasiloxane (TMTVS) and a platinum catalyst was first prepared and spin-coated on a silicon nitride membrane, and then the suspension was cross-linked and cured, followed by pyrolyzing at 1000 °C under a flowing Ar atmosphere. A dense amorphous silicon oxycarbon ceramic membrane with a thickness of about 1.8 µm was strongly bonded to the Si3N4 membrane substrate. The single gas permeation of H2 and CO2 indicated that the ideal permeation selectivity of H2/CO2 was up to 20 at 25 °C and 0.5 MPa with good long-term stability, indicating the potential application of the obtained membrane for hydrogen purification.
Funder
Anhui Provincial Natural Science Foundation