Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor

Abstract

In this paper, microelectromechanical systems (MEMS) technology was used to fabricate a novel extrinsic fiber Fabry–Perot (EFFP) strain sensor; this fiber sensor is applied to measure load with higher precision for a small structure. The sensor cavity consists of two Fabry–Perot (FP) cavity mirrors that are processed by surface micromachining and then fused and spliced together by the silicon–glass anode bonding process. The initial cavity length can be strictly controlled, and the excellent parallelism of the two faces of the cavity results in a high interference fineness. Then, the anti-reflection coating process is applied to the sensor to improve the clarity of the interference signal with the cavity, with its wavelength working within the range of the C + L band. Next, the sensor placement is determined by the finite element software Nastran. Experimental results indicate that the sensor exhibits a good linear response (99.77%) to load changes and a high repeatability. Considering the strain transfer coefficient, the sensitivity for the tested structure load is as high as 35.6 pm/N. Due to the miniaturization, repeatability, and easy-to-batch production, the proposed sensor can be used as a reliable and practical force sensor.