Advanced Micro-Actuator/Robot Fabrication Using Ultrafast Laser Direct Writing and Its Remote Control

Abstract

Two-photon polymerization (TPP) based on the femtosecond laser (fs laser) direct writing technique in the realization of high-resolution three-dimensional (3D) shapes is spotlighted as a unique and promising processing technique. It is also interesting that TPP can be applied to various applications in not only optics, chemistry, physics, biomedical engineering, and microfluidics but also micro-robotics systems. Effort has been made to design innovative microscale actuators, and research on how to remotely manipulate actuators is also constantly being conducted. Various manipulation methods have been devised including the magnetic, optical, and acoustic control of microscale actuators, demonstrating the great potential for non-contact and non-invasive control. However, research related to the precise control of microscale actuators is still in the early stages, and in-depth research is needed for the efficient control and diversification of a range of applications. In the future, the combination of the fs laser-based fabrication technique for the precise fabrication of microscale actuators/robots and their manipulation can be established as a next-generation processing method by presenting the possibility of applications to various areas.