Simulation of Modal Control of Metal Mode-Filtered Vertical-Cavity Surface-Emitting Laser

Abstract

In this study, a novel metal-dielectric film mode filter structure that can flexibly regulate the transverse mode inside vertical-cavity surface-emitting lasers (VCSELs) is proposed. The number, volume, and stability of transverse modes inside the VCSEL can be adjusted according to three key parameters—the oxide aperture, the metal aperture, and the distance between the oxide aperture and the metal aperture—to form a flexible window, and a new parameter is defined to describe the mode identification. This study provides a complete simulation theory basis and calculation method, which is of great significance for the optical mode control in VCSELs.