1. Physics Department, M.V. Lomonosov Moscow State University, Moscow 119991, Russia
2. Institute of Advanced Materials and Technologies, National Research University of Electronic Technology–MIET, Moscow 125993, Russia
3. Phystech School of Electronics, Photonics and Molecular Physics, Moscow Institute of Physics and Technology (National Research University), Moscow 141701, Russia
4. Department of Structural Analysis and Metrology, INME RAS, Leninsky Prospekt, Moscow 119991, Russia