1. National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering, School of Physics, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
2. National Key Laboratory of Solid-State Microwave Devices and Circuits, Nanjing Electronic Devices Institute, Nanjing 210016, China
3. School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210044, China
4. NanZhi Institute of Advanced Optoelectronic Integration Technology Co., Ltd., Nanjing 210018, China