1. Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. Institute of Microelectronics of Tianjin Binhai New Area, Tianjin 300308, China
4. Beijing Zhongke New Micro Technology Development Co., Ltd., Beijing 100029, China
5. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100085, China
6. Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems, Jincheng 048026, China
7. Jincheng Research Institute of Opto-Machatronics Industry, Jincheng 048026, China