A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

Abstract

To realize the measurement and exact reconstruction of a pair of parallel profiles, a new scanning method using four displacement sensors as probes and different probe spacings has been invented with the advantage of preventing data processing error. The measuring device is placed between the measured objects and moved by a scanning stage to collect measurement data of both measured profiles. Considering many existing methods, the high lateral resolution of the reconstruction result and the rejection of the data processing error cannot always be achieved at the same time. When the measured profiles are in the short wavelength range, data processing errors are often on the same order of magnitude as the height difference of the measured profiles. The new method can eliminate both the straightness error of the measurement reference and the data processing error. The exact reconstruction retaining the high lateral resolution and without data processing error can be realized by rational position arrangement of sensors and corresponding processing method of the measurement data. The new method possesses the following advantages: (i) achievement of the exact reconstruction without data processing error; (ii) high lateral resolution not limited by probe spacing; (iii) concise operation without zero calibration of probes; and (iv) suitability for on-machine measurement. The feasibility and advantages of the new method were demonstrated by theoretical analyses, simulations, and experimental results.