1. Center of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, China
2. Key Lab of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin 150080, China
3. Gas Turbine Division, No. 703 Reserch Institude of CSSC, Harbin 150078, China
4. Key Laboratory of CNC Equipment Reliability, Jilin University, Changchun 130025, China