A Co-Sputtering Process Optimization for the Preparation of FeGaB Alloy Magnetostrictive Thin Films
-
Published:2023-11-15
Issue:22
Volume:13
Page:2948
-
ISSN:2079-4991
-
Container-title:Nanomaterials
-
language:en
-
Short-container-title:Nanomaterials
Author:
Lin Qijing1234, Wang Zelin1, Meng Qingzhi1, Mao Qi1ORCID, Xian Dan1, Tian Bian134ORCID
Affiliation:
1. State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China 2. School of Mechanical and Manufacturing Engineering, Xiamen Institute of Technology, Xiamen 361021, China 3. Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China 4. Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an 710049, China
Abstract
A co-sputtering process for the deposition of Fe0.8Ga0.2B alloy magnetostrictive thin films is studied in this paper. The soft magnetic performance of Fe0.8Ga0.2B thin films is modulated by the direct-current (DC) sputtering power of an FeGa target and the radio-frequency (RF) sputtering power of a B target. Characterization results show that the prepared Fe0.8Ga0.2B films are amorphous with uniform thickness and low coercivity. With increasing FeGa DC sputtering power, coercivity raises, resulting from the enhancement of magnetism and grain growth. On the other hand, when the RF sputtering power of the B target increases, the coercivity decreases first and then increases because of the conversion of the films from a crystalline to an amorphous state. The lowest coercivity of 7.51 Oe is finally obtained with the sputtering power of 20 W for the FeGa target and 60 W for the B target. Potentially, this optimization provides a simple way for improving the magnetoelectric coefficient of magnetoelectric composite materials and the sensitivity of magnetoelectric sensors.
Funder
National Key Research and Development Program
Subject
General Materials Science,General Chemical Engineering
Reference22 articles.
1. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures;Zhang;Mater. Res. Lett.,2020 2. Wu, T., Bur, A., Hockel, J.L., Wong, K., Chung, T.-K., and Carman, G.P. (2011). Electrical and Mechanical Manipulation of Ferromagnetic Properties in Polycrystalline Nickel Thin Film. IEEE Magn. Lett., 2. 3. Lin, H., Gao, Y., Wang, X., Nan, T., Liu, M., Lou, J., Yang, G., Zhou, Z., Yang, X., and Wu, J. (2016). Integrated Magnetics and Multiferroics for Compact and Power-Efficient Sensing, Memory, Power, RF, and Microwave Electronics. IEEE Trans. Magn., 52. 4. Enhanced Planar Antenna Efficiency through Magnetic Thin-Films;Yao;IEEE J. Multiscale Multiphys. Comput. Tech.,2021 5. Gao, Y., Zare, S., Yang, X., Nan, T.X., Zhou, Z.Y., Onabajo, M., O’Brien, K.P., Jalan, U., EI-tatani, M., and Sun, N.X. (2014). High quality factor integrated gigahertz magnetic transformers with FeGaB/Al2O3 multilayer films for radio frequency integrated circuits applications. J. Appl. Phys., 115.
|
|