A Differential Phase-Modulated Interferometer with Rotational Error Compensation for Precision Displacement Measurement

Abstract

In this paper, a differential phase-modulated interferometer (DPMI) is proposed to compensate for the rotational error for precision displacement measurement. In DPMI, a reference interferometer sharing the same reference arm with the measurement interferometer is constructed. Using the two interferometers to differentially measure the displacement, the unbalanced environmental disturbance on the measurement can be minimized. An integrated 2 × 2 array photodetector (APD) is adopted in DPMI. Based on APD with differential wavefront sensing (DWS) technology, the rotation angle can be detected and compensated. Therefore, precision displacement without rotational error and unbalanced environmental disturbance can be achieved. Three confirmatory experiments were performed, and the experimental results show that the maximum displacement drift is reduced from 902.9 nm to 16.3 nm in 100 min stability test, the standard deviations between the pitch and yaw angles obtained by DPMI and Renishaw interferometer are 1.68 × 10−5° and 1.86 × 10−5°, respectively, and the maximum deviation between the measurement result of DPMI and the stage positioning before and after angle compensation is reduced from 5.207 μm to about 0.719 μm.