A High-Sensitivity Dual-Axis Accelerometer with Two FP Cavities Assembled on Single Optical Fiber

Abstract

In this paper, a dual-axis Fabry–Pérot (FP) accelerometer assembled on single optical fiber is proposed. The sensor is equipped with a special beam-splitting prism to split the light into two perpendicular directions (the X- and Y-axes); the prism surface coated with semi-permeable film and the reflective sheet on the corresponding Be-Cu vibration-sensitive spring form two sets of FP cavities of different sizes. When the Be-Cu spring with a proof mass (PM) is subjected to the vibration signal, the cavity length of the corresponding FP cavity is changed and the interference signal returns to the collimator through the original path of the prism. After bandpass filtering and demodulation, the two cavity lengths are obtained, and the acceleration measurement in dual-axis directions is completed. The resonant frequency of the proposed dual-axis fiber optic accelerometer is around 280 Hz. The results of the spectral measurements show 3.93 μm/g (g = 9.8 m/s2: gravity constant) and 4.19 μm/g for the applied acceleration along the X- and Y-axes, respectively, and the cross-axis sensitivity is below 5.1%. Within the angle range of 180°, the maximum error of measured acceleration is less than 3.77%. The proposed fiber optic dual-axis FP accelerometer has high sensitivity and strong immunity to electromagnetic interference. The size of the sensor mainly depends on the size of the prism, which is easy to reduce and mass produce. Moreover, this FP construction method has high flexibility and development potential.