Growth Substrate Geometry Optimization for the Productive Mechanical Dry Transfer of Carbon Nanotubes

Abstract

The selection of growth substrate geometries for the mechanical dry transfer of carbon nanotubes to device substrates depends on the precision of the assembly equipment. Since these geometries play a decisive role in the overall efficiency of the process, an investigation of the most important geometry parameters is carried out. The substrate geometry affects the number of carbon nanotubes suspended during the growth process and the speed of mechanical assembly at the same time. Since those two criteria are interlinked and affect productivity, a meta-model for the growth and selection of the nanotubes is simulated and a time study of the resulting assembly motions is subsequently performed. The geometry parameters are then evaluated based on the total number of suspended carbon nanotubes and the throughput rate, measured in transfers per hour. The accuracy specifications are then taken into account. Depending on the overall accuracy that can be achieved, different offset angles and overlaps between the growth and receiving substrate can be reached, which affect productivity differently for different substrate geometries. To increase the overall productivity, growth substrate designs are adapted to allow fully automated operation. This measure also reduces the frequency of substrate exchanges once all carbon nanotubes have been harvested. The introduction of substrates with multiple, polygonally arranged edges increases the total number of nanotubes that can be harvested. The inclusion of polygonally arranged edges in the initial analysis shows a significant increase in overall productivity.