Wireless Temperature Measurement for Curved Surfaces Based on AlN Surface Acoustic Wave Resonators

Abstract

In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the surface of the object under test. Compared to traditional rigid PCBs, FPCBs offer greater dynamic flexibility, lighter weight, and thinner thickness, which make them an ideal choice for making SAW devices working for temperature measurements under curved surfaces. We design a temperature sensor array consisting of three devices with different operating frequencies to measure the temperature at multiple points on the surface of the object. To distinguish between different target points in the sensor array, each sensor operates at a different frequency, and the operating frequency bands do not overlap. This differentiation is achieved using Frequency Division Multiple Access (FDMA) technology. Experimental results indicate that the frequency temperature coefficients of these sensors are −30.248 ppm/°C, −30.195 ppm/°C, and −30.115 ppm/°C, respectively. In addition, the sensor array enables wireless communication via antenna and transceiver circuits. This innovation heralds enhanced adaptability and applicability for SAW temperature sensor applications.