Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

Abstract

For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.