Optimization of Cost-Effective and Reproducible Flexible Humidity Sensors Based on Metal-Organic Frameworks

Abstract

In this letter, we present the extension of a previous work on a cost-effective method for fabricating highly sensitive humidity sensors on flexible substrates with a reversible response, allowing precise monitoring of the humidity threshold. In that work we demonstrated the use of three-dimensional metal-organic framework (MOF) film deposition based on the perylene-3,4,9,10-tetracarboxylate linker, potassium as metallic center and the interspacing of silver interdigitated electrodes (IDEs) as humidity sensors. In this work, we study one of the most important issues in efficient and reproducible mass production, which is to optimize the most important processes’ parameters in their fabrication, such as controlling the thickness of the sensor’s layers. We demonstrate this method not only allows for the creation of humidity sensors, but it also is possible to change the humidity value that changes the actuator state.