Effect of Grating Ruling Machine System Errors on Grating Spectral Performance

Abstract

Grating groove functions scalar theory can describe the light source through the grating interference and diffraction effect of the physical phenomenon of splitting light. It can be used to represent the distribution of the complex amplitude of the illumination light source on the diffraction screen under the action of the diffraction grating and display the information on the diffracted light position and intensity distribution. As a result, the effect of groove error on the intensity of grating ghost lines and stray light is analyzed. This paper presents an energy solution and analysis of the grating periodic groove error utilizing the grating scalar diffraction theory. Based on this, the effect of the core components of the grating ruling machines, such as screw and worm gear, on the stray light and ghost line of the grating is analyzed. Finally, the random groove error is analyzed. The analysis results show that the worm gear error is an important reason for the appearance of ghost lines in the machine ruling grating, and the lead screw error and random grooving error are the main reasons for the stray light produced by the grating. We optimize the worm gear, lead screw, and error compensation system of the grating ruling machine to effectively improve the ruling quality of the grating.