A High-Performance Thin-Film Sensor in 6G for Remote Sensing of the Sea Surface

Abstract

Functional devices in the THz band will provide a highly important technical guarantee for the promotion and application of 6G technology. We sought to design a high-performance sensor with a large area, high responsiveness, and low equivalent noise power, which is stable at room temperature for long periods and still usable under high humidity; it is suitable for the environment of marine remote sensing technology and has the potential for mass production. We prepared a Te film with high stability and studied its crystallization method by comparing the sensing and detection effects of THz waves at different annealing temperatures. It is proposed that the best crystallization and detection effect is achieved by annealing at 100 °C for 60 min, with a sensitivity of up to 19.8 A/W and an equivalent noise power (NEP) of 2.8 pW Hz−1/2. The effective detection area of the detector can reach the centimeter level, and this level is maintained for more than 2 months in a humid environment at 30 °C with 70–80% humidity and without encapsulation. Considering its advantages of stability, detection performance, large effective area, and easy mass preparation, our Te thin film is an ideal sensor for 6G ocean remote sensing technology.