Simulation of SAW Sensors with Various Distributed Mass Loadings Using Two-Dimensional Coupling-of-Modes Theory

Abstract

In order to accurately investigate the disturbance of complex distributed mass loading on surface acoustic wave (SAW) propagation characteristics, two-dimensional coupling-of-modes (2-D COM) theory and finite element method (FEM) were used to simulate the responses of SAW sensors. By using the PDE mode of FEM software, four SAW resonators with the loads in different distribution patterns were modeled. Also, we fabricated and measured a series of SAW resonators accordingly. The results showed that the 2-D COM theory combined with the finite element method was able to simulate the transverse modes of the device and the disturbance of the mass loading on the transverse mode effectively, making the simulation more accurate.