A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications
Author:
Chen Lungtai1, Chang Chinsheng1, Chien Liangju1, Lee Borshiun1, Shieh Wenlo2
Affiliation:
1. Smart Sensing and Systems Technology Center, Industrial Technology & Research Institute, Tainan 70955, Taiwan 2. Avantpac Technology Corporation, Kaohsiung 80673, Taiwan
Abstract
Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mechanism to embed a hydrophobic polytetrafluoroethylene (PTFE) filter into the upper cover of the gas sensor packaging. This approach is distinct from the current method of external pasting. The proposed packaging mechanism is successfully demonstrated in this study. The test results indicate that the innovative packaging with the PTFE filter reduced the average response value of the sensor to the humidity range of 75~95% RH by 60.6% compared to the packaging without the PTFE filter. Additionally, the packaging passed the High-Accelerated Temperature and Humidity Stress (HAST) reliability test. With a similar sensing mechanism, the proposed packaging embedded with a PTFE filter can be further employed for the application of exhalation-related, such as coronavirus disease 2019 (COVID-19), breath screening.
Funder
National Science Council of Taiwan
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference57 articles.
1. Liu, G., Tan, Q., Kou, H., Zhang, L., Wang, J., Lv, W., Dong, H., and Xiong, J. (2018). A Flexible Temperature Sensor Based on Reduced Graphene Oxide for Robot Skin Used in Internet of Things. Sensors, 18. 2. An Effective IoT Empowered Real-time Gas Detection System for Wireless Sensor Networks;Yadav;Int. Conf. Innov. Pract. Technol. Manag. (ICIPTM),2021 3. Development of MOX Gas Sensors Module for Indoor Air Contaminant Measurement;Abdullah;IOP Conf. Ser. Mater. Sci. Eng.,2019 4. Choi, S., Park, K., Lee, S., Lim, Y., Oh, B., Chae, H.Y., Park, C.S., Shin, H., and Kim, J.J. (2018). A three-step resolution-reconfigurable hazardous multi-gas sensor interface for wireless air-quality monitoring applications. Sensors, 18. 5. Bilgera, C., Yamamoto, A., Sawano, M., Matsukura, H., and Ishida, H. (2018). Application of Convolutional Long Short-Term Memory Neural Networks to Signals Collected from a Sensor Network for Autonomous Gas Source Localization in Outdoor Environments. Sensors, 18.
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