1. Department of Micro and Nanoelectronics, Saint Petersburg Electrotechnical University “LETI”, 197022 Saint Petersburg, Russia
2. The D.I. Mendeleev All-Russian Institute for Metrology (VNIIM), 190005 Saint Petersburg, Russia
3. Department of Automation and Control Processes, Saint Petersburg Electrotechnical University “LETI”, 197022 Saint Petersburg, Russia
4. Saint Petersburg Pasteur Institute, 197101 Saint Petersburg, Russia