AAO-Assisted Nanoporous Platinum Films for Hydrogen Sensor Application

Abstract

The effects of the porosity and the thickness on the ability of hydrogen sensing is demonstrated through a comparison of compact and nanoporous platinum film sensors. The synthesis of anodic aluminum oxide (AAO) nanotubes with an average pore diameter of less than 100 nm served as the template for the fabrication of nanoporous Pt films using an anodization method. This was achieved by applying a voltage of 40 V in 0.4 M of a phosphoric acid solution at 20 °C. To compare the film and nanoporous Pt, layers of approximately 3 nm and 20 nm were coated on both glass substrates and AAO templates using a sputtering technique. FESEM images monitored the formation of nanoporosity by observing the Pt layers covering the upper edges of the AAO nanotubes. Despite their low thickness and the poor long-range order, the EDX and XRD measurements confirmed and uncovered the crystalline properties of the Pt films by comparing the bare and the Pt deposited AAO templates. The nanoporous Pt and Pt thin film sensors were tested in the hydrogen concentration range between 10–50,000 ppm H2 at room temperature, 50 °C, 100 °C and 150 °C. The results reveal that nanoporous Pt performed higher sensitivity than the Pt thin film and the surface scattering phenomenon can express the hydrogen sensing mechanism of the Pt sensors.