Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser

Author:

Zhang Hui,Li Yi,Zhang Zhuo,Yang Chaoming,Liang Mingshan,Hu Yong,Wei HemingORCID,Pang Fufei

Abstract

A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of −2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

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