A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/18/2/362/pdf
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2. A Micro Resonant Gas Sensor With Adjustable Natural Frequency;IEEE Transactions on Industrial Electronics;2021-06
3. An 8 mW Fully Integrated Regenerative Resonant MEMS CO2 Sensor Using Linear Polyethylenimine as a Capture Layer;IEEE Sensors Journal;2021-03-01
4. Comparison between Linear and Branched Polyethylenimine and Reduced Graphene Oxide Coatings as a Capture Layer for Micro Resonant CO2 Gas Concentration Sensors;Sensors;2020-03-25
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