1. Laboratory of Solid-State Optoelectronic Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
3. State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
4. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
5. Key Laboratory of Semiconductor Neural Network Intelligent Perception and Computing Technology, Chinese Academy of Sciences, Beijing 100083, China