1. Institute of Biomedical Systems, National Research University of Electronic Technology MIET, Shokin Square 1, 124498 Moscow, Russia
2. Scientific-Manufacturing Complex “Technological Centre”, Shokin Square 1, bld. 7 off. 7237, 124498 Moscow, Russia
3. S.P. Kapitsa Research and Technology Institute, Ulyanovsk State University, 42 Leo Tolstoy Str., 432017 Ulyanovsk, Russia
4. Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Leninsky Prospekt 32A, 119991 Moscow, Russia
5. Institute for Bionic Technologies and Engineering, I.M. Sechenov First Moscow State Medical University, Bolshaya Pirogovskaya Street 2-4, 119991 Moscow, Russia