1. School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
2. Department of Precision Instrument, Tsinghua University, Beijing 100084, China
3. Key Laboratory of Smart Microsystem (Tsinghua University), Ministry of Education, Beijing 100084, China
4. State Key Laboratory of Precision Measurement Technology and Instruments, Beijing 100084, China
5. Beijing Laboratory of Biomedical Detection Technology and Instrument, Beijing 100084, China
6. Beijing Advanced Innovation Center for Integrated Circuits, Beijing 100084, China
7. China Mobile Research Institute, Beijing 100053, China
8. The IoT Intelligent Microsystem Center, Tsinghua University-China Mobile Joint Research Institute, Beijing 100084, China