Author:
Caliendo Cinzia,D'Amico Arnaldo,Lo Castro Fabio
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference31 articles.
1. Properties of Advanced Semiconductor Materials: GaN, AIN, InN, BN, SiC, SiGe;Levinshtein,2001
2. Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane
3. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors;Roper;J. Micromech. Microeng.,2006
4. Semipolar nitrides grown on Si(001) offcut substrates with 3C-SiC buffer layers;Isshiki;Mater. Sci. Forum,2009
5. Comparison of AlN thin films grown on sapphire and cubic-SiC substrates by LP-MOCVD;Tanaka;J. Crystal Growth,2000
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