Abstract
An ultra-compact broadband silicon polarizing beam splitter is proposed based on a tilted nano-grating structure. A light cross coupling can be realized for transverse-magnetic mode, while the transverse-electric light can almost completely output from the through port. The length of the coupling region is only 6.8 μm, while an extinction ratio of 23.76 dB can be realized at a wavelength of 1550 nm. As a proof of concept, the device was fabricated by a commercial silicon photonic foundry. It can realize a 19.84 dB extinction ratio and an 80 nm working bandwidth with an extinction ratio of larger than 10 dB. The presented device also shows a good fabrication tolerance to the structure deviations, which is favorable for its practical applications in silicon photonics.
Funder
National Natural Science Foundation of China
Shanghai Rising-Star Program
National Key Laboratory Foundation of China
Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning
Open Project Program of the Key Laboratory of Intelligent Infrared Perception, Chinese Academy of Sciences
Subject
General Materials Science,General Chemical Engineering
Cited by
13 articles.
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