Effect of Microindentation on Electroluminescence of SiC P-I-N Junctions

Abstract

The influence of microindentation on the electroluminescence of silicon carbide was studied in forward-biased 4H SiC p-i-n junctions. Four spectral regions at approximately 390, 420, 445 and 500 nm initially observed on virgin samples strongly depend, in regard to magnitude, on the condition of the starting die. These spectral regions may be interpreted as arising from either phonon-assisted band-to-band transitions or from defect-related transitions. The same SiC die were then subjected to mechanical damage brought about by a series of closely spaced microindentations directed approximately perpendicular to the c-axis. The spectra taken after a first set and subsequently a second set of microindentations are distinct from the initial spectra in all cases, and differences are interpreted as being due to the modification of existing defects or additional defects being generated mechanically. The influence of microindentation on the ideality factor is measured and discussed. Measured light flux with respect to a standard light source is also shown at each microindentation stage.